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Lithography & Mechatronics

Photo Lithography System

Our mask-less exposure equipment has succeeded greatly in cutting down cost and time which were previously required for production of photomask.
Data images to be projected onto the work by irradiating light to DMD and performing on-off control to each mirror that is synchronized to its proper stage. Maintenance is minimum because it uses LED as light source.

Machining Ceramic

Responding to a strong demand from our customers, we have minimized the unwanted jaggies effect resulting from lithographic exposure. Our fine exposure mode has been installed on all mask-less exposure machines as standard equipment.
With a high resolution at 0.1µm level, data reproducibility for both diagonal and curved lines patterns have been dramatically improved.

Plant
Machining Ceramic

Mechatronics

NC/CNC Micro Machining Center

Micro MC Series

Micro MC series: small micro machining center is generally used for various purposes as from a prototype machine for R&D to a dedicated machine for mass production.
4 standard models are available including Micro MC-1 which has wide stroke. Additionally, there are abundance of options; such as ATC, alignment camera and ultrasonic spindle.
We will propose you the optimal one depending on the purpose, requested accuracy and budget, etc.

Anodic Bonding Equipment

Anodic Bonding Equipment

Ink-Jet Printing Machine

Ink-Jet Printing Machine

Anodic Bonding Equipment

Anodic Bonding Equipment

Ink-Jet Printing Machine

Ink-Jet Printing Machine